Rotary Magnetron Cathode

 

Rotary Magnetrons show many benefits in comparison to Planar Magnetrons as:

  • Reduced Machine downtime
  • Higher depositions rates
  • Increased process stability for reactive depositions



 Rotary Magnetron Cathode
Our Rotatable Magnetrons are engineered to achieve high target utilization, while maintaining excellent film properties and deposition uniformity.

Features:
  • 3 end block configurations available: Compact End Block, External End Block, Standard End Block
  • No lip seals
  • High integrity ferro fluid vacuum seal
  • Integrated ceramic water coupling
  • Focused field magnetics improves deposition efficiency
  • Quick target changes (<20 minutes)
  • Non-proprietary target tube design - fabrication drawing supplied
  • No protruding features on target tube - enables slip on targets
  • Sputtering of magnetic materials also possible

 

Data sheets
Rotary Magnetron Cathode [*.pdf]
Magnet Bar [*.pdf]