Planar Magnetrons Mov-Mags TM

 

Target materials for sputtering magnetrons can be very expensive. Our Moving Magnet Planar Magnetrons Mov-MagsTM are engineered to achieve high target utilization, while maintaining excellent film properties and deposition uniformity.

An innovative solution to poor target utilization of expensive targets:

  • Increased target utilization Excellent film properties
  • Compact design enables direct retrofit of existing planar magnetrons
  • Custom sizes (3+ meters)

 Typical Applications:

  • ITO Films
  • Precious metals (costly target materials)
  • Dual AC sputtering of insulating layers
  • Uniformity and consistent film properties throughout target life
Data sheets
Mov-Mags [*.pdf, 1.5 MB]